A Novel Manufacturing Technology for RF MEMS Devices on Ceramic Substrates
نویسندگان
چکیده
منابع مشابه
RF MEMS Switch Technology
Commercial Applications Solid state and electromagnetic relay switches are being replaced by MEMS switches due to their lower costs and increased application performance. Some of the benefits of MEMS switches include low power consumption, long life cycle, linearity and increased switching speeds. Applications include highspeed digital channel switching in automated test equipment, filter bank ...
متن کاملLaser micromachining for manufacturing MEMS devices
Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.
متن کاملA Flexible Fabrication Process for RF MEMS Devices
RF MEMS are assuming a great importance in the fast evolving telecommunication market and space applications. In the last years a flexible technology platform has been developed and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components as well as complex RF circuits working in the frequency range from sub-GHz up to more than 100 GHz. The paper reports about the f...
متن کاملA capacitive RF power sensor based on MEMS technology
Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the electrostatic force between an RF signal line and a suspended membrane. The electrostatic force, which is proportional to the square of the rms signal voltage and thus to the signal power, results in a displacement of the suspended membrane. This displacement is detected capacitively, allowing the sensing of the ...
متن کاملModeling and Simulation of RF MEMS devices
A stable, device specific, multiple energy domain and multi scale simulation tool for Radio Frequency (RF) MicroElectroMechanicalSystems (MEMS) devices is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The Computer Aided Design (CAD) tool incorporates physical parameters such as surface roughness. An electromechanical...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Sensors
سال: 2010
ISSN: 1687-725X,1687-7268
DOI: 10.1155/2010/625325